Etching nano IC chips in a dry etching machine with photoresist. Ed Garcia, UC Long Beach 9 June 2015 I have tried atmospheric treatment on nano IC chips but find oxygen gas allows me to etch away with proper photoresist applied. Competing interests University of California affiliation.
Etching nano IC chips in a dry etching machine with photoresist.
9 June 2015
I have tried atmospheric treatment on nano IC chips but find oxygen gas allows me to etch away with proper photoresist applied.
Competing interests
University of California affiliation.