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2015, :. doi:10.1186/s40563-015-0031-7
2015-01-30T00:56:59+08:00
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� 2015 Scholtz et al.; licensee Springer.
2015, :. doi:10.1186/s40563-015-0031-7
Nb-doped TiO2 films
Roughness
Reactive deposition
Substrate bias
Switched power supply
Pulsed bias effect on roughness of TiO2:Nb films deposited by grid assisted magnetron sputtering
Juliano Sadi Scholtz
True
Nb-doped TiO2 films,Roughness,Reactive deposition,Substrate bias,Switched power supply
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